Publication detail
Estimation of mechanical properties of thin Al surface layer
PETRÁČKOVÁ, K. KUBĚNA, I. TRUHLÁŘ, M. NÁHLÍK, L. KRUML, T.
Czech title
Stanovení mechanických vlastností tenké povrchové vrstvy Al
English title
Estimation of mechanical properties of thin Al surface layer
Type
conference paper
Language
en
Original abstract
The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 microns and their height was about 2 microns. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.
Czech abstract
Článek se popisuje novou metodu zvanou mikrokompresní test pro stanovení mechanických vlastností tenkých vrstev. Tento test je proveden na tenké vrstvě Al na křemíkovém substrátu a zahrnuje jak přípravu vzorku pomocí fokusovaného iontového svazku (FIB), tak mikrokompresní test za použití nanoindentoru.
English abstract
The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 microns and their height was about 2 microns. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.
Keywords in Czech
mokrokomprese, vlastnosti tenké vrstvy, fokusovaný iontový svazek, numerické modelování
Keywords in English
microcompression, thin film properties, focused ion beam, FEM modelling
RIV year
2012
Released
16.04.2012
ISBN
978-80-261-0097-3
Book
14th International Conference Applied Mechanics 2012
Pages from–to
117–120
Pages count
4
BIBTEX
@inproceedings{BUT97123,
author="Klára {Petráčková} and Ivo {Kuběna} and Michal {Truhlář} and Luboš {Náhlík} and Tomáš {Kruml},
title="Estimation of mechanical properties of thin Al surface layer",
booktitle="14th International Conference Applied Mechanics 2012",
year="2012",
month="April",
pages="117--120",
isbn="978-80-261-0097-3"
}