Stanovení mechanických vlastností tenké povrchové vrstvy Al

Estimation of mechanical properties of thin Al surface layer

článek ve sborníku ve WoS nebo Scopus

en

The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 microns and their height was about 2 microns. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.

Článek se popisuje novou metodu zvanou mikrokompresní test pro stanovení mechanických vlastností tenkých vrstev. Tento test je proveden na tenké vrstvě Al na křemíkovém substrátu a zahrnuje jak přípravu vzorku pomocí fokusovaného iontového svazku (FIB), tak mikrokompresní test za použití nanoindentoru.

The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 microns and their height was about 2 microns. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.

mokrokomprese, vlastnosti tenké vrstvy, fokusovaný iontový svazek, numerické modelování

microcompression, thin film properties, focused ion beam, FEM modelling

2012

16.04.2012

978-80-261-0097-3

14th International Conference Applied Mechanics 2012

117–120

4