Publication detail
Mechanical properties of Al thin film measured by two different methods
KUBĚNA, I. KRUML, T.
Czech title
Mechanické vlastnosti tenké Al vrstvy měřené dvěmi různými metodami
English title
Mechanical properties of Al thin film measured by two different methods
Type
journal article - other
Language
en
Original abstract
Mechanical properties of an aluminium thin film were measured by microcompression and indentation tests. The microcompression technique combines preparation of specimens using focused ion beam (FIB) and compression test by a nanoindeter device. Cylindrical specimens were prepared by focused ion beam milling. The height of cylindrical specimens was about 2 mm and their diameter about 1,3 mm. The load and displacement were continuously measured during tests. The stress-strain curves were obtained in two representations. Stresses of the first plastic bursts were determined in both representations. Hardness and Young modulus were measured by indentation test using continuous stiffness method. Representative values of thin film were calculated.
Czech abstract
Mechanické vlastnosti tenké hliníkové vrstvy byly měřeny mikrokompresí a indentací. Mikrokomprese kombinuje přípravu vzorků pomocí fokusovaného iontového svazku a kompresní text pomocí nanoindentoru. Válcové vzokry o průměru 1.3 mikrometru a výšce 2 mikrometrů byly připraveny pomocí fokusovaného iontového svazku. Během testu byly zaznamenávány síla a posunutí indentoru. Křivky napětí-deformace byly získány ve dvou reprezentacích. Tvrdost a modul pružnosti byly měřeny metodou "continuous stiffness measurement".
English abstract
Mechanical properties of an aluminium thin film were measured by microcompression and indentation tests. The microcompression technique combines preparation of specimens using focused ion beam (FIB) and compression test by a nanoindeter device. Cylindrical specimens were prepared by focused ion beam milling. The height of cylindrical specimens was about 2 mm and their diameter about 1,3 mm. The load and displacement were continuously measured during tests. The stress-strain curves were obtained in two representations. Stresses of the first plastic bursts were determined in both representations. Hardness and Young modulus were measured by indentation test using continuous stiffness method. Representative values of thin film were calculated.
Keywords in Czech
tenká vrstva, fokusovaný iontový svazek, hliník, nanoindentace
Keywords in English
thin films, focused ion beam, aluminium, nanoindentation
RIV year
2011
Released
01.11.2011
ISSN
1335-1532
Volume
17
Number
3
Pages from–to
163–168
Pages count
6
BIBTEX
@article{BUT75370,
author="Ivo {Kuběna} and Tomáš {Kruml},
title="Mechanical properties of Al thin film measured by two different methods",
year="2011",
volume="17",
number="3",
month="November",
pages="163--168",
issn="1335-1532"
}