Detail publikace
Mechanické vlastnosti tenké Al vrstvy měřené dvěmi různými metodami
KUBĚNA, I. KRUML, T.
Český název
Mechanické vlastnosti tenké Al vrstvy měřené dvěmi různými metodami
Anglický název
Mechanical properties of Al thin film measured by two different methods
Typ
článek v časopise - ostatní, Jost
Jazyk
en
Originální abstrakt
Mechanical properties of an aluminium thin film were measured by microcompression and indentation tests. The microcompression technique combines preparation of specimens using focused ion beam (FIB) and compression test by a nanoindeter device. Cylindrical specimens were prepared by focused ion beam milling. The height of cylindrical specimens was about 2 mm and their diameter about 1,3 mm. The load and displacement were continuously measured during tests. The stress-strain curves were obtained in two representations. Stresses of the first plastic bursts were determined in both representations. Hardness and Young modulus were measured by indentation test using continuous stiffness method. Representative values of thin film were calculated.
Český abstrakt
Mechanické vlastnosti tenké hliníkové vrstvy byly měřeny mikrokompresí a indentací. Mikrokomprese kombinuje přípravu vzorků pomocí fokusovaného iontového svazku a kompresní text pomocí nanoindentoru. Válcové vzokry o průměru 1.3 mikrometru a výšce 2 mikrometrů byly připraveny pomocí fokusovaného iontového svazku. Během testu byly zaznamenávány síla a posunutí indentoru. Křivky napětí-deformace byly získány ve dvou reprezentacích. Tvrdost a modul pružnosti byly měřeny metodou "continuous stiffness measurement".
Anglický abstrakt
Mechanical properties of an aluminium thin film were measured by microcompression and indentation tests. The microcompression technique combines preparation of specimens using focused ion beam (FIB) and compression test by a nanoindeter device. Cylindrical specimens were prepared by focused ion beam milling. The height of cylindrical specimens was about 2 mm and their diameter about 1,3 mm. The load and displacement were continuously measured during tests. The stress-strain curves were obtained in two representations. Stresses of the first plastic bursts were determined in both representations. Hardness and Young modulus were measured by indentation test using continuous stiffness method. Representative values of thin film were calculated.
Klíčová slova česky
tenká vrstva, fokusovaný iontový svazek, hliník, nanoindentace
Klíčová slova anglicky
thin films, focused ion beam, aluminium, nanoindentation
Rok RIV
2011
Vydáno
01.11.2011
ISSN
1335-1532
Ročník
17
Číslo
3
Strany od–do
163–168
Počet stran
6
BIBTEX
@article{BUT75370,
author="Ivo {Kuběna} and Tomáš {Kruml},
title="Mechanical properties of Al thin film measured by two different methods",
year="2011",
volume="17",
number="3",
month="November",
pages="163--168",
issn="1335-1532"
}