Publication detail
An in situ study of processes taking place on a silicon surface during bombardment by CFx/Ar ions - etching versus polymerization
ŠIKOLA, T. ARMOUR, D. VAN DEN BERG, J.
English title
An in situ study of processes taking place on a silicon surface during bombardment by CFx/Ar ions - etching versus polymerization
Type
book chapter
Language
en
RIV year
1994
Released
01.01.1994
Publisher
Institut für Ionenphysik, Universität Innsbruck
Location
Hintermoos/Maria Alm, Univ. Innsbruck,
Book
SASP 94 - Symposium on atomic, cluster and surface physics
Pages count
7
BIBTEX
@inbook{BUT51967,
author="Tomáš {Šikola} and Dave {Armour} and Jaap {Van den berg},
title="An in situ study of processes taking place on a silicon surface during bombardment by CFx/Ar ions – etching versus polymerization",
booktitle="SASP 94 - Symposium on atomic, cluster and surface physics",
year="1994",
month="January",
publisher="Institut für Ionenphysik, Universität Innsbruck",
address="Hintermoos/Maria Alm, Univ. Innsbruck,"
}