Publication detail

Monitoring of surface homogeneity of optical parameters of thin films.

URBÁNEK, M. ŠIKOLA, T. NEBOJSA, A. SPOUSTA, J. DITTRICHOVÁ, L. CHMELÍK, R. ZLÁMAL, J. JIRUŠE, J.

English title

Monitoring of surface homogeneity of optical parameters of thin films.

Type

conference paper

Language

en

Original abstract

Monitoring of surface homogeneity of optical parameters of thin films

English abstract

Monitoring of surface homogeneity of optical parameters of thin films

Keywords in English

thin films

RIV year

2001

Released

17.04.2000

Publisher

Editors: B. Michel, T. Winkler, M. Werner,H. Fecht

Location

Berlin

Book

Micromat 2000

Pages count

6

BIBTEX


@inproceedings{BUT4155,
  author="Michal {Urbánek} and Tomáš {Šikola} and Alois {Nebojsa} and Jiří {Spousta} and Libuše {Dittrichová} and Radim {Chmelík} and Jakub {Zlámal} and Jaroslav {Jiruše},
  title="Monitoring of surface homogeneity of optical parameters of thin films.",
  booktitle="Micromat 2000",
  year="2000",
  month="April",
  publisher="Editors: B. Michel, T. Winkler, M. Werner,H. Fecht",
  address="Berlin"
}