Publication detail
A simplified local surface photoreflectance measurement
BENEŠOVÁ, M. TOMÁNEK, P. DOBIS, P. GRMELA, L.
Czech title
Zjednodušená metoda lokálního měření fotoodrazivosti povrchu
English title
A simplified local surface photoreflectance measurement
Type
conference paper
Language
en
Original abstract
A simple and economical photoreflectance measurement that can easily be adapted to conventional scanning optical microscopes is presented. In this design, the laser source is sine-wave modulated so that the second harmonic modulation distorsion within the optical probe beam before and after reflection off the sample surface can be monitored. The desired photoreflectance measurement, which is taken as the change of reflectance as a result of varying the incident optical power, is then obtained from the change in the ration of the fundamental and second-harmonic signals. The set-up and technique by measuring the implantation damage in nitrogen-implanted silicon samples is demonstrated.
English abstract
A simple and economical photoreflectance measurement that can easily be adapted to conventional scanning optical microscopes is presented. In this design, the laser source is sine-wave modulated so that the second harmonic modulation distorsion within the optical probe beam before and after reflection off the sample surface can be monitored. The desired photoreflectance measurement, which is taken as the change of reflectance as a result of varying the incident optical power, is then obtained from the change in the ration of the fundamental and second-harmonic signals. The set-up and technique by measuring the implantation damage in nitrogen-implanted silicon samples is demonstrated.
Keywords in English
Reflectance, laser reflectivity, material surface characterization, optical near field, near-field scanning optical microscopy.
RIV year
2001
Released
27.06.2001
Publisher
VUTIUM
Location
Brno
ISBN
80-214-1892-3
Book
Proceedings of Materials structure and micromechanics fracture
Pages count
6
BIBTEX
@inproceedings{BUT3348,
author="Markéta {Benešová} and Pavel {Tománek} and Pavel {Dobis} and Lubomír {Grmela},
title="A simplified local surface photoreflectance measurement",
booktitle="Proceedings of Materials structure and micromechanics fracture",
year="2001",
month="June",
publisher="VUTIUM",
address="Brno",
isbn="80-214-1892-3"
}