Detail publikace
Zjednodušená metoda lokálního měření fotoodrazivosti povrchu
BENEŠOVÁ, M. TOMÁNEK, P. DOBIS, P. GRMELA, L.
Český název
Zjednodušená metoda lokálního měření fotoodrazivosti povrchu
Anglický název
A simplified local surface photoreflectance measurement
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
en
Originální abstrakt
A simple and economical photoreflectance measurement that can easily be adapted to conventional scanning optical microscopes is presented. In this design, the laser source is sine-wave modulated so that the second harmonic modulation distorsion within the optical probe beam before and after reflection off the sample surface can be monitored. The desired photoreflectance measurement, which is taken as the change of reflectance as a result of varying the incident optical power, is then obtained from the change in the ration of the fundamental and second-harmonic signals. The set-up and technique by measuring the implantation damage in nitrogen-implanted silicon samples is demonstrated.
Anglický abstrakt
A simple and economical photoreflectance measurement that can easily be adapted to conventional scanning optical microscopes is presented. In this design, the laser source is sine-wave modulated so that the second harmonic modulation distorsion within the optical probe beam before and after reflection off the sample surface can be monitored. The desired photoreflectance measurement, which is taken as the change of reflectance as a result of varying the incident optical power, is then obtained from the change in the ration of the fundamental and second-harmonic signals. The set-up and technique by measuring the implantation damage in nitrogen-implanted silicon samples is demonstrated.
Klíčová slova anglicky
Reflectance, laser reflectivity, material surface characterization, optical near field, near-field scanning optical microscopy.
Rok RIV
2001
Vydáno
27.06.2001
Nakladatel
VUTIUM
Místo
Brno
ISBN
80-214-1892-3
Kniha
Proceedings of Materials structure and micromechanics fracture
Počet stran
6
BIBTEX
@inproceedings{BUT3348,
author="Markéta {Benešová} and Pavel {Tománek} and Pavel {Dobis} and Lubomír {Grmela},
title="A simplified local surface photoreflectance measurement",
booktitle="Proceedings of Materials structure and micromechanics fracture",
year="2001",
month="June",
publisher="VUTIUM",
address="Brno",
isbn="80-214-1892-3"
}