Publication detail

Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films

KADLEC, J. JELÍNEK, M. KOCOUREK, T. DVOŘÁK, M. JOSKA, Z.

Czech title

Hybridní laserová-magnetronová depozice TiC a TiCN

English title

Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films

Type

conference paper

Language

en

Original abstract

Hybrid laser-magnetron deposition systéme was developed and tested for study carbon based thin films. Films were fabricated in argon (TiC) and in argon/nitrogen (TiCN). Crystaline films were grown at room substrate temperature. Film properties were studied by SEM, XRD, XPS and GDOES

Czech abstract

Depoziční systém pro hybridní laserovou-magnetronovou depozici byl navržen a testován pro studium tenkých povlaků na základě uhlíku. Tenké povlaky byly vytvářeny v atmosféře argonu nebo směsi argonu a dusíku. Byly vytvořeny krystalické povlaky i za pokojové teploty. Vlastnosti vytvořených povlaků byly hodnoceni metodami SEM, XRD, XPS a GDOES

English abstract

Hybrid laser-magnetron deposition systéme was developed and tested for study carbon based thin films. Films were fabricated in argon (TiC) and in argon/nitrogen (TiCN). Crystaline films were grown at room substrate temperature. Film properties were studied by SEM, XRD, XPS and GDOES

Keywords in Czech

Hybridní depozice, strukturní valstnosti, povlaky TiC-TiCN

Keywords in English

Hybrid deposicion, structure properties, TiC-TiCN films

RIV year

2008

Released

30.06.2008

Publisher

Brno University of Technology

Location

Brno

ISBN

978-80-214-3659-6

Book

9th ABA

Edition number

1

Pages from–to

32–36

Pages count

5

BIBTEX


@inproceedings{BUT32392,
  author="Jaromír {Kadlec} and Miroslav {Jelínek} and Tomáš {Kocourek} and Milan {Dvořák} and Zdeněk {Joska},
  title="Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films",
  booktitle="9th ABA",
  year="2008",
  month="June",
  pages="32--36",
  publisher="Brno University of Technology",
  address="Brno",
  isbn="978-80-214-3659-6"
}