Publication detail
Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems
PAN, S. CHEN, K. VĚCHET, S.
English title
Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems
Type
conference paper
Language
en
Original abstract
Fast positioning and vibration suppression play important roles in virtually all tasks requiring high speed maneuvers with sufficient motion accuracy
English abstract
Fast positioning and vibration suppression play important roles in virtually all tasks requiring high speed maneuvers with sufficient motion accuracy
Keywords in English
active stage; rubber bearing; flexible structure; vibration suppression; image inspection
Released
07.12.2022
Location
Pilsen
ISBN
978-1-6654-1040-3
Book
2022 20th International Conference on Mechatronics - Mechatronika (ME)
Pages from–to
1–6
Pages count
6
BIBTEX
@inproceedings{BUT182474,
author="Kuo-Shen {Chen} and Stanislav {Věchet},
title="Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems",
booktitle="2022 20th International Conference on Mechatronics - Mechatronika (ME)",
year="2022",
month="December",
pages="1--6",
address="Pilsen",
isbn="978-1-6654-1040-3"
}