Detail publikace
Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems
PAN, S. CHEN, K. VĚCHET, S.
Anglický název
Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
en
Originální abstrakt
Fast positioning and vibration suppression play important roles in virtually all tasks requiring high speed maneuvers with sufficient motion accuracy
Anglický abstrakt
Fast positioning and vibration suppression play important roles in virtually all tasks requiring high speed maneuvers with sufficient motion accuracy
Klíčová slova anglicky
active stage; rubber bearing; flexible structure; vibration suppression; image inspection
Vydáno
07.12.2022
Místo
Pilsen
ISBN
978-1-6654-1040-3
Kniha
2022 20th International Conference on Mechatronics - Mechatronika (ME)
Strany od–do
1–6
Počet stran
6
BIBTEX
@inproceedings{BUT182474,
author="Kuo-Shen {Chen} and Stanislav {Věchet},
title="Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems",
booktitle="2022 20th International Conference on Mechatronics - Mechatronika (ME)",
year="2022",
month="December",
pages="1--6",
address="Pilsen",
isbn="978-1-6654-1040-3"
}