Publication detail

About the information depth of backscattered electron imaging

Š. MIKMEKOVÁ L. FRANK

English title

About the information depth of backscattered electron imaging

Type

journal article in Web of Science

Language

en

Original abstract

he information depth of imaging with backscattered electrons in the scanning electron microscope was measured directly by comparison of a planar view of a steel sample with buried precipitates with an image of a section cut through precipitates by means of a Focused Ion Beam attachment. The information depth was determined across the electron energy range of units of keV and the results were compared with information depths calculated from two published equations and simulated using widely available Monte Carlo‐based software. Recommendations are given for routine estimations of BSE information depths.

English abstract

he information depth of imaging with backscattered electrons in the scanning electron microscope was measured directly by comparison of a planar view of a steel sample with buried precipitates with an image of a section cut through precipitates by means of a Focused Ion Beam attachment. The information depth was determined across the electron energy range of units of keV and the results were compared with information depths calculated from two published equations and simulated using widely available Monte Carlo‐based software. Recommendations are given for routine estimations of BSE information depths.

Keywords in English

Backscattered electrons, information depth, penetration of electrons

Released

01.03.2017

Publisher

Royal Microscopical Society

ISSN

1365-2818

Volume

266

Number

3 2017

Pages from–to

335–342

Pages count

7

BIBTEX


@article{BUT149390,
  author="Jakub {Piňos},
  title="About the information depth of backscattered electron imaging",
  year="2017",
  volume="266",
  number="3 2017",
  month="March",
  pages="335--342",
  publisher="Royal Microscopical Society",
  issn="1365-2818"
}