Detail publikace
About the information depth of backscattered electron imaging
Š. MIKMEKOVÁ L. FRANK
Anglický název
About the information depth of backscattered electron imaging
Typ
článek v časopise ve Web of Science, Jimp
Jazyk
en
Originální abstrakt
he information depth of imaging with backscattered electrons in the scanning electron microscope was measured directly by comparison of a planar view of a steel sample with buried precipitates with an image of a section cut through precipitates by means of a Focused Ion Beam attachment. The information depth was determined across the electron energy range of units of keV and the results were compared with information depths calculated from two published equations and simulated using widely available Monte Carlo‐based software. Recommendations are given for routine estimations of BSE information depths.
Anglický abstrakt
he information depth of imaging with backscattered electrons in the scanning electron microscope was measured directly by comparison of a planar view of a steel sample with buried precipitates with an image of a section cut through precipitates by means of a Focused Ion Beam attachment. The information depth was determined across the electron energy range of units of keV and the results were compared with information depths calculated from two published equations and simulated using widely available Monte Carlo‐based software. Recommendations are given for routine estimations of BSE information depths.
Klíčová slova anglicky
Backscattered electrons, information depth, penetration of electrons
Vydáno
01.03.2017
Nakladatel
Royal Microscopical Society
ISSN
1365-2818
Ročník
266
Číslo
3 2017
Strany od–do
335–342
Počet stran
7
BIBTEX
@article{BUT149390,
author="Jakub {Piňos},
title="About the information depth of backscattered electron imaging",
year="2017",
volume="266",
number="3 2017",
month="March",
pages="335--342",
publisher="Royal Microscopical Society",
issn="1365-2818"
}