Publication detail
Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing
VÁLEK, L. ŠIK, J.
Czech title
Řízení mikrodefektů během růstu CZ krystalů a výroby Si desek
English title
Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing
Type
book chapter
Language
en
Original abstract
The chapter on the growth of single crystals of Czochralski silicon and formation and control of crystal defects in silicon. The book deals with bulk crystal growth and thin film preparation.
Czech abstract
Kapitola o růstu monokrystalů křemíku Czochralskiho metodou a o vzniku a řízení defektů v těchto krystalech. Kniha je zaměřena na problematiku přípravy objemových krystalů a tenkých vrstev.
English abstract
The chapter on the growth of single crystals of Czochralski silicon and formation and control of crystal defects in silicon. The book deals with bulk crystal growth and thin film preparation.
Keywords in Czech
křemík; monokrystal; defekty
Keywords in English
silicon; single crystal; defects
RIV year
2012
Released
13.01.2012
Publisher
INTECH
Location
Rieka, Croatia
ISBN
978-953-307-610-2
Book
Modern Aspects of Bulk Crystal and Thin Film Preparation
Edition number
1
Pages from–to
43–70
Pages count
28
BIBTEX
@inbook{BUT89045,
author="Lukáš {Válek} and Jan {Šik},
title="Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing",
booktitle="Modern Aspects of Bulk Crystal and Thin Film Preparation",
year="2012",
month="January",
pages="43--70",
publisher="INTECH",
address="Rieka, Croatia",
isbn="978-953-307-610-2"
}