Publication detail

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

NEDĚLA, V. KONVALINA, I. LENCOVÁ, B. ZLÁMAL, J.

Czech title

Srovnání vypočteného, simulovaného a měřeného zesílení signálu v SEM s proměnným tlakem.

English title

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

Type

journal article - other

Language

en

Original abstract

This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.

Czech abstract

Článek předkládá vypočtené závislosti zesílení signálu detekovaných elektronů na tlaku vodních par v SEM.

English abstract

This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.

Keywords in Czech

Interakce elektron-plyn; Simulace Monte-Carlo; Zesílení signálu; Analytický model

Keywords in English

Electron-gas interactions; Monte Carlo simulations; Signal amplification; Analytical models

RIV year

2011

Released

21.07.2011

ISSN

0168-9002

Journal

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT

Volume

645

Number

1

Pages from–to

79–83

Pages count

5

BIBTEX


@article{BUT72697,
  author="Vilém {Neděla} and Ivo {Konvalina} and Bohumila {Lencová} and Jakub {Zlámal},
  title="Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM",
  journal="NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT",
  year="2011",
  volume="645",
  number="1",
  month="July",
  pages="79--83",
  issn="0168-9002"
}