Publication detail
Near-field photoluminescence as high resolution diagnostics of semiconductor structures
OTEVŘELOVÁ, D. DOBIS, P. BRÜSTLOVÁ, J. TOMÁNEK, P.
English title
Near-field photoluminescence as high resolution diagnostics of semiconductor structures
Type
conference paper
Language
en
Original abstract
Scanning Near-field Optical Microscope, in which an uncoated single-mode fiber tip is used both as nanosource to excite the semiconductor sample and as nanoprobe to investigate characteristics of the structure and to pick up the photoluminescence (PL) reflected from the sample, is applied for the diagnostics of the defects in semiconductor devices. Using the high lateral resolution of the microscope with fast micro-photoluminiscence response, it is possible to locate non-luminescence defects in a multiple quantum well grown by molecular beam epitaxy. Near-field characteristics of measured spectral PL intensity are also discussed.
English abstract
Scanning Near-field Optical Microscope, in which an uncoated single-mode fiber tip is used both as nanosource to excite the semiconductor sample and as nanoprobe to investigate characteristics of the structure and to pick up the photoluminescence (PL) reflected from the sample, is applied for the diagnostics of the defects in semiconductor devices. Using the high lateral resolution of the microscope with fast micro-photoluminiscence response, it is possible to locate non-luminescence defects in a multiple quantum well grown by molecular beam epitaxy. Near-field characteristics of measured spectral PL intensity are also discussed.
Keywords in English
Scanning near-field optical microscope, photoluminescence, quantum well structure, spectral photoluminescence intensity, subwavelength resolution
RIV year
2001
Released
27.06.2001
Publisher
VUTIUM
Location
Brno
ISBN
80-24-14-1892-3
Book
Proceedings of Materials structure and micromechanics of fracture
Pages count
5
BIBTEX
@inproceedings{BUT6096,
author="Dana {Otevřelová} and Pavel {Dobis} and Jitka {Brüstlová} and Pavel {Tománek},
title="Near-field photoluminescence as high resolution diagnostics of semiconductor structures",
booktitle="Proceedings of Materials structure and micromechanics of fracture",
year="2001",
month="June",
publisher="VUTIUM",
address="Brno",
isbn="80-24-14-1892-3"
}