Publication detail

Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams

LOPOUR, F. ŠIKOLA, T. SPOUSTA, J. DITTRICHOVÁ, L. BÁBOR, P. DUARTE, J. MATĚJKA, F.

English title

Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams

Type

conference paper

Language

en

Original abstract

Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams

English abstract

Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams

Keywords in English

Microstructures, SPM

RIV year

2001

Released

19.04.2000

Publisher

Editors: B. Michel, T. Winkler, M. Werner,H. Fecht

Location

Berlin

Book

MicroMat 2000

Pages count

4

BIBTEX


@inproceedings{BUT4036,
  author="Filip {Lopour} and Tomáš {Šikola} and Jiří {Spousta} and Libuše {Dittrichová} and Petr {Bábor} and Juan {Duarte} and František {Matějka},
  title="Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams",
  booktitle="MicroMat 2000",
  year="2000",
  month="April",
  publisher="Editors: B. Michel, T. Winkler, M. Werner,H. Fecht",
  address="Berlin"
}