Publication detail

Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances

OHLÍDAL, I. FRANTA, D. OHLÍDAL, M. NAVRÁTIL, K.

English title

Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances

Type

journal article - other

Language

en

Original abstract

In this contribution a new efficient modification of a method that enables us to perform the optical characterization of nonabsorbing and weakly absorbing thin films without using the absolute values of the reflectances measured is presented. Namely, this modification is based on determining the values of the wavelengths corresponding to touching the spectral dependences of the reflectances of the studied films measured for several angles of incidence with the envelopes of maxima and minima of these spectral dependences. By means of combining the explicit formulas containing the wavelengths mentioned and the suitable iteration procedure one can evaluate the values of the thicknesses and spectral dependences of the refractive indices of the films analyzed in reliable and precise ways. (C) 2001 Optical Society of America.

English abstract

In this contribution a new efficient modification of a method that enables us to perform the optical characterization of nonabsorbing and weakly absorbing thin films without using the absolute values of the reflectances measured is presented. Namely, this modification is based on determining the values of the wavelengths corresponding to touching the spectral dependences of the reflectances of the studied films measured for several angles of incidence with the envelopes of maxima and minima of these spectral dependences. By means of combining the explicit formulas containing the wavelengths mentioned and the suitable iteration procedure one can evaluate the values of the thicknesses and spectral dependences of the refractive indices of the films analyzed in reliable and precise ways. (C) 2001 Optical Society of America.

Keywords in English

REFLECTION, CONSTANTS, THICKNESS, SILICON, SYSTEM

RIV year

2001

Released

01.11.2001

ISSN

0003-6935

Volume

2001 (40

Number

31

Pages count

7

BIBTEX


@article{BUT39790,
  author="Ivan {Ohlídal} and Daniel {Franta} and Miloslav {Ohlídal} and Karel {Navrátil},
  title="Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances",
  year="2001",
  volume="2001 (40",
  number="31",
  month="November",
  issn="0003-6935"
}