2D calculation of parasitic fields in misaligned multipole electron-optical systems

journal article in Web of Science

en

The effects of geometrical imperfections in electron-optical components are usually evaluated in 3D simulations. These calculations inherently take a long time, require a large amount of memory, and do not directly produce the necessary axial field functions. We present a 2D perturbation method to calculate parasitic fields in misaligned multipole systems. Our method is based on finding an equivalent potential perturbation, similarly to Sturrock's method, but does not rely on the potential being differentiable. The method is directly applicable to both electrostatic and non-saturated magnetic problems. It does not require any 3D data and it is fully compatible with existing finite element method codes such as EOD. The proposed method produces axial field functions with an accuracy of units to a few tens of percents, depending on the number of unperturbed multipole field components used and the geometry. The results can then be used, for instance, to determine the parasitic imaging aberrations of the misaligned optical system using standard methods, in order to evaluate the effect of mechanical design tolerances.

The effects of geometrical imperfections in electron-optical components are usually evaluated in 3D simulations. These calculations inherently take a long time, require a large amount of memory, and do not directly produce the necessary axial field functions. We present a 2D perturbation method to calculate parasitic fields in misaligned multipole systems. Our method is based on finding an equivalent potential perturbation, similarly to Sturrock's method, but does not rely on the potential being differentiable. The method is directly applicable to both electrostatic and non-saturated magnetic problems. It does not require any 3D data and it is fully compatible with existing finite element method codes such as EOD. The proposed method produces axial field functions with an accuracy of units to a few tens of percents, depending on the number of unperturbed multipole field components used and the geometry. The results can then be used, for instance, to determine the parasitic imaging aberrations of the misaligned optical system using standard methods, in order to evaluate the effect of mechanical design tolerances.

Parasitic aberrations; Electrode misalignment; Perturbation theory; Sturrock's principle; Charged particle optics; Electrostatic deflector

01.08.2023

ELSEVIER

AMSTERDAM

0304-3991

253

November 2023

1–8

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