Publication detail

Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration

SKOUPÝ, R. FOŘT, T. KRZYŽÁNEK, V.

English title

Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration

Type

journal article in Web of Science

Language

en

Original abstract

The thickness of electron transparent samples can be measured in an electron microscope using several imaging techniques like electron energy loss spectroscopy (EELS) or quantitative scanning transmission electron microscopy (STEM). We extrapolate this method for using a back-scattered electron (BSE) detector in the scanning electron microscope (SEM). This brings the opportunity to measure the thickness not just of the electron transparent samples on TEM mesh grids, but, in addition, also the thickness of thin films on substrates. Nevertheless, the geometry of the microscope and the BSE detector poses a problem with precise calibration of the detector. We present a simple method which can be used for such a type of detector calibration that allows absolute (standardless) measurement of thickness, together with a proof of the method on test samples.

English abstract

The thickness of electron transparent samples can be measured in an electron microscope using several imaging techniques like electron energy loss spectroscopy (EELS) or quantitative scanning transmission electron microscopy (STEM). We extrapolate this method for using a back-scattered electron (BSE) detector in the scanning electron microscope (SEM). This brings the opportunity to measure the thickness not just of the electron transparent samples on TEM mesh grids, but, in addition, also the thickness of thin films on substrates. Nevertheless, the geometry of the microscope and the BSE detector poses a problem with precise calibration of the detector. We present a simple method which can be used for such a type of detector calibration that allows absolute (standardless) measurement of thickness, together with a proof of the method on test samples.

Keywords in English

SEM; quantitative imaging; back-scattered electrons; standardless calibration; electron mirror; sample bias; Monte Carlo simulation; thin coating layers

Released

15.02.2020

Publisher

MDPI

Location

BASEL

ISSN

2079-4991

Volume

10

Number

2

Pages from–to

1–11

Pages count

11

BIBTEX


@article{BUT164642,
  author="Radim {Skoupý} and Tomáš {Fořt} and Vladislav {Krzyžánek},
  title="Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration",
  year="2020",
  volume="10",
  number="2",
  month="February",
  pages="1--11",
  publisher="MDPI",
  address="BASEL",
  issn="2079-4991"
}