Publication detail
Optimization of Deposition Parameters of a DLC Layer Using (RF) PECVD Technology
PROKEŠ, T. MOURALOVÁ, K. ZAHRADNÍČEK, R. BEDNÁŘ, J. KALIVODA, M.
Czech title
Optimalizace parametrů depozice DLC vrstvy pomocí technologie (RF) PACVD
English title
Optimization of Deposition Parameters of a DLC Layer Using (RF) PECVD Technology
Type
book chapter
Language
en
Original abstract
The aim of this study was to carry out a planned experiment (DoE) in order to find a suitable combination of deposition parameters to increase the hardness of the coating. In a 20-round experiment, parameters of chamber pressure, gas flow and the power of an RF source were gradually changed. Subsequently, a micro hardness analysis was carried out using the Berkovich method. Using the DoE method, a combination of parameters was detected within which a comparable hardness of the coating was achieved as with doping of the hydrogen atoms coating to increase the number of Sp3 carbon bonds. Within the indentation test, a scratch test was carried out to determine the normal force required to break the coating.
Czech abstract
Cílem této studie byla realizace plánovaného experimentu (DoE) za účelem nalezení vhodné kombinace parametrů depozice s cílem zvýšit tvrdost povlaku. V experimentu obsahujícím 20 kol byly postupně měněny parametry tlak v komoře, průtok plynu a výkon RF zdroje. Následně byla provedena analýza mikro tvrdosti metodou berkovich. Pomocí metody DoE byla nalazena kombinace parametrů, při které bylo dosaženo srovnatelné tvrdosti povlaku jako při dopování povlaku atomy vodíku pro zvýšení počtu Sp3 vazeb uhlíku. Při indentačním testu byl proveden scratch test, kterým byla zjištěna normálová síla nutná pro protržení povlaku.
English abstract
The aim of this study was to carry out a planned experiment (DoE) in order to find a suitable combination of deposition parameters to increase the hardness of the coating. In a 20-round experiment, parameters of chamber pressure, gas flow and the power of an RF source were gradually changed. Subsequently, a micro hardness analysis was carried out using the Berkovich method. Using the DoE method, a combination of parameters was detected within which a comparable hardness of the coating was achieved as with doping of the hydrogen atoms coating to increase the number of Sp3 carbon bonds. Within the indentation test, a scratch test was carried out to determine the normal force required to break the coating.
Keywords in Czech
DLC, RF PECVD, tvrdost povlaku, vrypový test, DoE, Berkovich
Keywords in English
DLC, RF PECVD, Coating hardness, scrath test, DoE, Berkovich
Released
11.03.2021
Publisher
Springer International Publishing
Location
Švýcarsko
ISBN
978-3-030-61659-5
ISSN
1434-9922
Book
Recent Advances in Soft Computing and Cybernetics
Volume
2021
Number
403
Pages from–to
53–62
Pages count
10
BIBTEX
@inbook{BUT157677,
author="Tomáš {Prokeš} and Pavel {Hrabec} and Kateřina {Mouralová} and Radim {Zahradníček} and Josef {Bednář} and Milan {Kalivoda},
title="Optimization of Deposition Parameters of a DLC Layer Using (RF) PECVD Technology",
booktitle="Recent Advances in Soft Computing and Cybernetics",
year="2021",
volume="2021",
number="403",
month="March",
pages="53--62",
publisher="Springer International Publishing",
address="Švýcarsko",
isbn="978-3-030-61659-5",
issn="1434-9922"
}