Publication detail

Optimization of Deposition Parameters of a DLC Layer Using (RF) PECVD Technology

PROKEŠ, T. MOURALOVÁ, K. ZAHRADNÍČEK, R. BEDNÁŘ, J. KALIVODA, M.

Czech title

Optimalizace parametrů depozice DLC vrstvy pomocí technologie (RF) PACVD

English title

Optimization of Deposition Parameters of a DLC Layer Using (RF) PECVD Technology

Type

book chapter

Language

en

Original abstract

The aim of this study was to carry out a planned experiment (DoE) in order to find a suitable combination of deposition parameters to increase the hardness of the coating. In a 20-round experiment, parameters of chamber pressure, gas flow and the power of an RF source were gradually changed. Subsequently, a micro hardness analysis was carried out using the Berkovich method. Using the DoE method, a combination of parameters was detected within which a comparable hardness of the coating was achieved as with doping of the hydrogen atoms coating to increase the number of Sp3 carbon bonds. Within the indentation test, a scratch test was carried out to determine the normal force required to break the coating.

Czech abstract

Cílem této studie byla realizace plánovaného experimentu (DoE) za účelem nalezení vhodné kombinace parametrů depozice s cílem zvýšit tvrdost povlaku. V experimentu obsahujícím 20 kol byly postupně měněny parametry tlak v komoře, průtok plynu a výkon RF zdroje. Následně byla provedena analýza mikro tvrdosti metodou berkovich. Pomocí metody DoE byla nalazena kombinace parametrů, při které bylo dosaženo srovnatelné tvrdosti povlaku jako při dopování povlaku atomy vodíku pro zvýšení počtu Sp3 vazeb uhlíku. Při indentačním testu byl proveden scratch test, kterým byla zjištěna normálová síla nutná pro protržení povlaku.

English abstract

The aim of this study was to carry out a planned experiment (DoE) in order to find a suitable combination of deposition parameters to increase the hardness of the coating. In a 20-round experiment, parameters of chamber pressure, gas flow and the power of an RF source were gradually changed. Subsequently, a micro hardness analysis was carried out using the Berkovich method. Using the DoE method, a combination of parameters was detected within which a comparable hardness of the coating was achieved as with doping of the hydrogen atoms coating to increase the number of Sp3 carbon bonds. Within the indentation test, a scratch test was carried out to determine the normal force required to break the coating.

Keywords in Czech

DLC, RF PECVD, tvrdost povlaku, vrypový test, DoE, Berkovich

Keywords in English

DLC, RF PECVD, Coating hardness, scrath test, DoE, Berkovich

Released

11.03.2021

Publisher

Springer International Publishing

Location

Švýcarsko

ISBN

978-3-030-61659-5

ISSN

1434-9922

Book

Recent Advances in Soft Computing and Cybernetics

Volume

2021

Number

403

Pages from–to

53–62

Pages count

10

BIBTEX


@inbook{BUT157677,
  author="Tomáš {Prokeš} and Pavel {Hrabec} and Kateřina {Mouralová} and Radim {Zahradníček} and Josef {Bednář} and Milan {Kalivoda},
  title="Optimization of Deposition Parameters of a DLC Layer Using (RF) PECVD Technology",
  booktitle="Recent Advances in Soft Computing and Cybernetics",
  year="2021",
  volume="2021",
  number="403",
  month="March",
  pages="53--62",
  publisher="Springer International Publishing",
  address="Švýcarsko",
  isbn="978-3-030-61659-5",
  issn="1434-9922"
}