Publication detail

NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS

HARČARÍK, M. JANKOVÝCH, R.

English title

NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS

Type

journal article in Scopus

Language

en

Original abstract

Increasing demands for manufacturing quality and new standards in surface metrology foreshadow a widespread adoption of 3D surface topography measurement in manufacturing quality control. This raises the question of instrument selection. Coherence scanning interferometry and laser scanning confocal microscopy are some of the most common technologies in optical measurement of surface topography. These methods differ significantly in their suitability for different types of measurement. This article provides a comparison of the measurement noise and step height measurement performance two measuring instruments based on these two principles in relation to objectives used for measurement. Such data can be used to inform instrument selection in an industrial environment.

English abstract

Increasing demands for manufacturing quality and new standards in surface metrology foreshadow a widespread adoption of 3D surface topography measurement in manufacturing quality control. This raises the question of instrument selection. Coherence scanning interferometry and laser scanning confocal microscopy are some of the most common technologies in optical measurement of surface topography. These methods differ significantly in their suitability for different types of measurement. This article provides a comparison of the measurement noise and step height measurement performance two measuring instruments based on these two principles in relation to objectives used for measurement. Such data can be used to inform instrument selection in an industrial environment.

Keywords in English

surface texture, confocal microscopy, coherence scanning interferometry, comparison of instruments, topography measurement noise, step height repeatability

Released

13.12.2017

Publisher

MM (Modern Machinery) Science Journal

Location

Praha

ISSN

1805-0476

Volume

2017

Number

5

Pages from–to

2030–2034

Pages count

5

BIBTEX


@article{BUT142924,
  author="Matej {Harčarík} and Róbert {Jankových},
  title="NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS",
  year="2017",
  volume="2017",
  number="5",
  month="December",
  pages="2030--2034",
  publisher="MM (Modern Machinery) Science Journal",
  address="Praha",
  issn="1805-0476"
}