Vliv přípravy substrátu, podmínek anodizace a pos anodizační úpravy na mikrostrukturu anodického oxidu hllinitého

THE INFLUENCE OF SUBSTRATE PREPARATION, ANODIZATION CONDITIONS AND POST ANODIZING TREATMENT ON AAO MICROSTRUCTURE

conference paper

en

Series of anodization experiments was conducted on pure aluminium (99,95 Goodfellow) substrates with the aim to map the possibilities and evaluate available techniques. Oxalic acid electrolyte was used for anodization at different voltage levels ranging from 20 to 60V, while current was always measured continuously during the experiment. The influence of substrate surface treatment, time and grain size of the substrate was documented for as anodized oxide structures using FEG-SEM. Well aligned and evenly distributed pores of the diameters ranging 20- 35 nm were achieved. Extremely fine pores down to 10 nm were achieved using the step-down technique governed by current limitation. Further post-anodizing treatment was evaluated – pore widening by chemical and electrochemical etching, which resulted in pores 80nm wide.

Série experimentů anodizované byla provedena na čistého hliníku (99,95 Goodfellow) substrátů za cíl zmapovat možnosti a vyhodnocovat dostupných technik. Šťavelová kyselina elektrolyt byl použit pro anodizace na různých úrovních napětí v rozmezí od 20 do 60 V, přičemž proud byl vždy měří kontinuálně v průběhu experiment. Vliv povrchové ošetření substrátu, času a velikostí zrna substrátu byl dokumentován tak eloxované struktury oxidu pomocí FEG-SEM. No vyrovnané a rovnoměrně rozděleny póry průměry v rozmezí 20- 35 nm bylo dosaženo. Extrémně jemné póry dolů na 10 nm bylo dosaženo pomocí step-down Technika upravuje dosavadní omezení. Další zpracování post-anodizace byl hodnocen – pórů rozšíření by chemické a elektrochemické leptání, což mělo za následek póry 80nm široký.

Series of anodization experiments was conducted on pure aluminium (99,95 Goodfellow) substrates with the aim to map the possibilities and evaluate available techniques. Oxalic acid electrolyte was used for anodization at different voltage levels ranging from 20 to 60V, while current was always measured continuously during the experiment. The influence of substrate surface treatment, time and grain size of the substrate was documented for as anodized oxide structures using FEG-SEM. Well aligned and evenly distributed pores of the diameters ranging 20- 35 nm were achieved. Extremely fine pores down to 10 nm were achieved using the step-down technique governed by current limitation. Further post-anodizing treatment was evaluated – pore widening by chemical and electrochemical etching, which resulted in pores 80nm wide.

Anodic alumina, AAO, anodization, electrodeposition, nanowires

2014

21.05.2014

978-80-87294-52-9

Metal 2014

953–957

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