Aplikace MKP k určování mechanických vlastností tenkých vrstev

APPLICATION OF FEM TO ESTIMATE OF MECHANICAL PROPERTIES OF THIN LAYERS

abstract

en

This paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Experimentally measured data obtained on (micro) pillars need correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling (FEM) is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.

Tento článek popisuje novou metodu k testování tenkých vrstev, takzvaný mikrokompresní test. V rámci článku byly také prezentovány postupy numerického modelování za použití MKP k verifikaci a korekci záskaných výsledků.

This paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Experimentally measured data obtained on (micro) pillars need correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling (FEM) is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.

Mikrokompresní test, MKP

Microcompresion test, FEM

15.04.2013

15th International Conference, APPLIED MECHANICS 2013